Method and apparatus for pulling monocrystals from a melt contai

Details Method and apparatus for pulling monocrystals from a melt contai Method and apparatus for pulling monocrystals from a melt contai

1996-10-01

1998-06-09

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from liquid or supercritical state

Having pulling during growth

117 14, 117218, C30B 1524

Patent

active

057627037

ABSTRACT:
A puller (22) above the melt extracts a crystal (8) upwardly out of the melt surface into a laterally turnable airlock chamber (5) An uncoupling device (7) provided between the crystal (8) and the puller permits the severance of the crystal (8) from the puller. The device (7) is formed by a coupling ring (10) connected to the pull shaft (22) and having a longitudinal slot (9) which cooperates with a crystal holder which is provided with a mushroom-shaped head part (11), and by an airlock ring (14) held by the cover plate (15) of the airlock chamber (5). Airlock gates (13, 13') journaled on the airlock ring (14) pivot about horizontal axes (35, 35') from a horizontal locking position to a vertical open position and vice versa, their end faces (16, 16') forming an opening (17) in the locking position, thereby encompassing the shaft (19) of the seed holder (12) to lock it in the plane of the airlock ring (14).

REFERENCES:
patent: 3822111 (1974-07-01), Suzuki et al.
patent: 4301120 (1981-11-01), Sibley
patent: 4350560 (1982-09-01), Helgeland et al.

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