Method and apparatus for pulling a monocrystal

Details Method and apparatus for pulling a monocrystal Method and apparatus for pulling a monocrystal

1998-03-13

2000-01-18

Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

C30B 3500

Patent

active

060154608

ABSTRACT:
A method and an apparatus for pulling a silicon monocrystal from a melt iudes the pulling of a conical portion in each case at the beginning and at the end of the monocrystal and the pulling of a cylindrical portion between the conical portions. In this method, the surface of the conical portion at the beginning of the monocrystal is shielded by a shielding means spaced apart from the monocrystal.

REFERENCES:
patent: 4078897 (1978-03-01), Jericho
patent: 5361721 (1994-11-01), Takano et al.
patent: 5578123 (1996-11-01), Vilzmann et al.

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