Method and apparatus for providing uniform illumination of a...

Details Method and apparatus for providing uniform illumination of a... Method and apparatus for providing uniform illumination of a...

2005-11-17

2008-09-23

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07428039

ABSTRACT:
An optical system for projecting a laser-beam on a mask to illuminate the mask includes a beam homogenizing arrangement including spaced arrays of microlenses. The beam homogenizing arrangement redistributes light in the laser beam such that the intensity of light in the laser-beam on the mask is nearly uniform along a transverse axis of the laser-beam. A stop extending partially into the laser-beam between the microlens arrays provides a more uniform light-intensity on the mask along the transverse axis than can be achieved by the microlens arrays alone.

REFERENCES:
patent: 6494371 (2002-12-01), Rekow et al.
patent: 2001/0028448 (2001-10-01), Mori
patent: 2003/0086265 (2003-05-01), Ilsaka et al.

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