Thermal measuring and testing – Temperature measurement – Combined with diverse art device
Patent
1998-04-03
1999-11-02
Gutierrez, Diego
Thermal measuring and testing
Temperature measurement
Combined with diverse art device
374137, 374179, 136225, 136233, 136241, 356376, 73105, G01K 704, G01K 306, G01B 904
Patent
active
059757574
ABSTRACT:
An apparatus and method for providing a topographical and thermal image of a semiconductor device. A probe (10) is made from a first ribbon of material (11) and a second ribbon of material (12) which forms a thermocouple junction (13). A probe tip (15) is then attached to the thermocouple junction (13) with an epoxy (14). In an alternate embodiment of the present invention, a probe (20) has a point region (17) which is formed by bending a portion of the thermocouple junction (13) and coating the point region (17) is coated with a thermally conductive material. An optical signal is then reflected off a planar portion of the first ribbon of material (11), the second ribbon of material (12), or the thermocouple junction (13) so the motion of the probe (10,20) can be monitored by an optical detector.
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Hopson Theresa J.
Legge Ronald N.
Collopy Daniel R.
Doan Quyen
Gutierrez Diego
Koch William E.
Motorola Inc.
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