Method and apparatus for providing interconnection between metal

Details Method and apparatus for providing interconnection between metal Method and apparatus for providing interconnection between metal

1987-11-02

1989-10-10

James, Andrew J.

Fishing, trapping, and vermin destroying

357 69, 437191, 437192, 437189, H01L 2348, H01L 4500, H01L 2904

Patent

active

048735655

ABSTRACT:
A metal stud (24) is provided for interconnecting levels of metallization separated by an insulator on a semiconductor slice (10). A lead (12) is coated with a refractory metal (14) and a platable metal cap (16). A photoresist (18 ) is then applied and a cavity (22) is formed within the photoresist (18 ). The cavity (22) is plated to form the stud (24). The stud (24) is clad with a corrosion resistant layer (28).

REFERENCES:
patent: 3290565 (1966-12-01), Hastings
patent: 3508118 (1970-04-01), Merrin
patent: 4725877 (1988-02-01), Brasen

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