Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-03-28
2006-03-28
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S110000, C702S083000
Reexamination Certificate
active
07020535
ABSTRACT:
A method includes defining a design window for a manufacturing process performed by a tool and a process window within the design window. A workpiece likely to have a characteristic outside the process window is identified. The characteristic of the identified workpiece is measured. A control model for controlling the tool is updated using the measured characteristic. A system includes a tool, a process controller, a metrology tool, and a sampling controller. The tool is adapted to process workpieces in accordance with a manufacturing process. The manufacturing process has an associated design window and a process window defined within the design window. The process controller is adapted to control the tool using a control model. The sampling controller is adapted to identify a workpiece likely to have a characteristic outside the process window and direct the metrology tool to measure the characteristic of the identified workpiece. The process controller is further adapted to update the control model using the measured characteristic.
REFERENCES:
patent: 6587744 (2003-07-01), Stoddard et al.
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patent: 6687561 (2004-02-01), Pasadyn et al.
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patent: 2003/0049390 (2003-03-01), Shanmugasundram et al.
Bode Christopher A.
Chong Robert J.
Stirton J. Broc
Advanced Micro Devices , Inc.
Garland Steven R.
Picard Leo
Williams Morgan & Amerson
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