Method and apparatus for providing a purified resource in a manu

Details Method and apparatus for providing a purified resource in a manu Method and apparatus for providing a purified resource in a manu

1997-11-17

2000-11-14

Joyce, Harold

Ventilation

Clean room

F24F 316

Patent

active

061462667

ABSTRACT:
A method and apparatus provides a resource capable of affecting the manufacture of a product to a bay and a chase. Clean resource is supplied to the bay where it is used to affect the manufacture of a product in one or more steps highly sensitive to contaminants in the resource. The resource contaminated by the manufacture of the product is then sent to a chase where it is further used to affect the manufacture of the same or a different product in steps that are less sensitive to the contamination of the resource. Because the bay is most sensitive to contaminants in the resource, the impurified resource received at the chase may not adversely affect the manufacture of products in the chase and thus, supplying a clean resource to the chase is unnecessary.

REFERENCES:
patent: 4880581 (1989-11-01), Dastoli et al.
patent: 5326316 (1994-07-01), Hashimoto et al.

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