Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Reexamination Certificate
2006-11-21
2006-11-21
Porta, David (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Ultraviolet light responsive means
Reexamination Certificate
active
07138640
ABSTRACT:
The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that transports contaminants away from the optical surfaces of the optical components. Another aspect of the invention relates to a transparent cover that physically blocks contaminants from reaching the optical surfaces of the optical components. Yet another aspect of the invention relates to a combination of the gas purge system and the transparent cover.
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Delgado Gil
McMurtry John
Wiley James
Baker David S.
Beyer Weaver & Thomas LLP
KLA-Tencor Technologies Corporation
Porta David
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