Method and apparatus for protecting a substrate surface from con

Details Method and apparatus for protecting a substrate surface from con Method and apparatus for protecting a substrate surface from con

1994-06-13

1995-12-05

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118715, 118722, 118723R, 118724, 20429801, C23F 102, C23C 1648, C23C 1428

Patent

active

054725500

ABSTRACT:
An apparatus for processing a substrate surface in a process chamber wherein during chemical or physical altering of the substrate surface a laser beam is projected inside the processing chamber and along a trajectory which does not contact the substrate surface in order to capture particles by means of the photophoretic effect, particles which would otherwise impinge upon and contaminate the substrate surface.

REFERENCES:
patent: 4579750 (1986-04-01), Bowen et al.
patent: 4617237 (1986-10-01), Gupta et al.
patent: 4664938 (1987-05-01), Walker
patent: 4685976 (1987-08-01), Schachameyer et al.
patent: 4828874 (1989-05-01), Hiraoka et al.
patent: 5205870 (1993-04-01), Sato et al.
patent: 5247190 (1993-09-01), Friend et al.
patent: 5328555 (1994-07-01), Gupta

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