Method and apparatus for projection printing

Details Method and apparatus for projection printing Method and apparatus for projection printing

1987-06-18

1988-05-24

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 77, G03B 2774, G03B 2780, G03B 2732

Patent

active

047469587

ABSTRACT:
Method and apparatus for projection printing uses a photodetector provided on a first plane which is approximately the same as a second plane on which an exposure takes place on a substrate when an image of a pattern is projected on the substrate, and moves the photodetector to arbitrary positions on the first plane so as to measure the illuminance at the arbitrary positions and obtain an illuminance distribution. An optical system is adjusted to obtain a uniform illuminance distribution before projecting the image of the pattern on the substrate.

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patent: 4265532 (1981-05-01), McIntosh
patent: 4512657 (1985-04-01), Sakato
patent: 4540277 (1985-09-01), Mayer et al.

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