X-ray or gamma ray systems or devices – Source
Patent
1985-04-26
1987-02-17
Church, Craig E.
X-ray or gamma ray systems or devices
Source
378 34, 378122, 2504922, 3133621, 31323101, 31323151, H05H 134
Patent
active
046445765
ABSTRACT:
A plasma source (34, 150) for producing a pulse of soft x-rays includes a tubular cathode electrode (76) concentric within, and surrounded by a generally cylindrical anode electrode (44). A fast-acting gas valve (101, 152) discharges a plurality of inclined gas streams between the anode electrode (44) and cathode electrode (76) to form a gas shell (122, 176). Just after the shell is formed, a large, time varying voltage is transmitted to the anode and cathode electrodes to produce an intense electric field therebetween which ionizes the shell, transforming it into a sheath of plasma which collapses. The collapse of the plasma sheath yields a hot dense volume of plasma which radiates a burst of soft x-rays useful for lithographic purposes.
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AT&T - Technologies, Inc.
Church Craig E.
Freeman John C.
Levy R. B.
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