Coherent light generators – Particular active media – Semiconductor
Reexamination Certificate
2005-12-13
2005-12-13
Ho, Tan (Department: 2828)
Coherent light generators
Particular active media
Semiconductor
C372S043010, C372S044010, C372S045013
Reexamination Certificate
active
06975661
ABSTRACT:
The invention includes a method of fabricating a laser device, that includes: depositing a photoresist on epitaxially grown layers, patterning said photoresist to form an aperture area, depositing a dielectric material on said patterned photoresist, depositing a liftoff layer on said dielectric material, removing portions of said dielectric material and liftoff layer that border said aperture area, implanting regions of the epitaxially grown layers bordering said aperture area, and depositing a metal layer on said dielectric material. The invention also includes a device including: a substrate comprising epitaxial layers and an aperture area, a dielectric mirror formed on top of said aperture area and an implanted region within said epitaxial layers, said implanted region bordering said aperture area.
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Al-Nazer Leith A
Finisar Corporation
Ho Tan
Workman Nydegger
LandOfFree
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