Coherent light generators – Particular beam control device – Nonlinear device
Reexamination Certificate
2008-02-12
2009-12-15
Nguyen, Dung T (Department: 2828)
Coherent light generators
Particular beam control device
Nonlinear device
C372S022000, C372S069000
Reexamination Certificate
active
07633979
ABSTRACT:
An all-solid-state laser system produces coherent DUV radiation through a third or fourth harmonic generation. The fundamental wavelength is generated by a slave laser optically pumped by one or more light source(s) of high density array(s) and is stabilized by injecting optical seeds whose wavelength is rapidly swept to cover the fundamental wavelength. The pump effects are enhanced by a pump chamber that recycles unabsorbed pump light. The present invention enables DUV pulses with a width shorter than 1 ns and a repetition rate higher than 100 kHz. The output DUV wavelength is adjustable by selecting an appropriate seeder.
REFERENCES:
patent: 6031854 (2000-02-01), Ming
patent: 6088379 (2000-07-01), Owa et al.
patent: 6249371 (2001-06-01), Masuda et al.
patent: 6373869 (2002-04-01), Jacob
patent: 6381255 (2002-04-01), Van Saarloos et al.
patent: 6700906 (2004-03-01), Hackel et al.
patent: 2005/0094682 (2005-05-01), Tulloch et al.
patent: 2006/0215714 (2006-09-01), Luo et al.
patent: 2007/0177638 (2007-08-01), Seelert et al.
patent: 2008/0037604 (2008-02-01), Savage-Leuchs
patent: WO/2006/087650 (2006-07-01), None
“All-solid-state, high-power, deep-UV laser system based on cascaded sum-frequency mixing in CsLiB6O10 crystals”, Sakuma et al. Applied Optics, vol. 39, No. 30, 5505 (2000).
“Generation of all-solid-state, high-power continuous-wave 213-nm light based on sum-frequency mixing in CsLiB6O10”, Sakuma et al. Optics Letters, vol. 29, 1096 (2004).
“An all solid-state UV source based on a frequency quadrupled, passively Q-switched 946 nm laser”, Johansson et al. Optics Express, vol. 15, No. 2, 449 (2007).
Luo Ningyi
Zhu Sheng-Bai
Nguyen Dung T
Pavilion Integration Corporation
LandOfFree
Method and apparatus for producing UV laser from... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for producing UV laser from..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for producing UV laser from... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4074392