Method and apparatus for producing semiconductor device

Details Method and apparatus for producing semiconductor device Method and apparatus for producing semiconductor device

2005-06-07

2005-06-07

Kunemund, Robert (Department: 1765)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth with a subsequent step of heat treating...

C117S004000, C117S007000, C117S904000, C438S149000, C438S166000

Reexamination Certificate

active

06902616

ABSTRACT:
A liquid crystal display device is manufactured by first forming a crystalline semiconductor film2103, of silicon for example, over an insulating substrate2101, such as glass. The substrate is warped in the process. The warpage is corrected by suction against a stage2201. The film crystallinity is enhanced by scanning with a linear laser beam.

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