Chemistry of inorganic compounds – Nitrogen or compound thereof – Binary compound
Reexamination Certificate
2006-08-25
2010-10-26
Vanoy, Timothy C (Department: 1793)
Chemistry of inorganic compounds
Nitrogen or compound thereof
Binary compound
C423S409000
Reexamination Certificate
active
07820127
ABSTRACT:
A method for producing nitrogen trifluoride related to the present invention is characterized in that a fluorine gas and an ammonia gas are fed into a tubular reactor and are reacted with each other in the presence of a diluting gas in a gaseous phase under the condition of no catalyst to produce a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride, and then the solid product attached to an inner wall of the tubular reactor is removed by means of a device for removing the solid product, which device is mounted to the tubular reactor.
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Ohi Toshio
Ohno Hiromoto
Sakai Yuji
Hou Michelle
Showa Denko K.K.
Sughrue & Mion, PLLC
Vanoy Timothy C
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