Method and apparatus for producing neutral atomic and molecular

Details Method and apparatus for producing neutral atomic and molecular Method and apparatus for producing neutral atomic and molecular

1986-03-19

1988-10-04

Anderson, Bruce C.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

250398, H01J 3726

Patent

active

047757892

ABSTRACT:
A method and apparatus for producing a neutral beam of oxygen or other gas for use in testing of materials and for heavy particle etching is disclosed. A beam of positively ionized gas is accelerated and filtered to produce a beam having ions of a selected energy. The beam is decelerated to an energy of the level required and directed toward a photo emissive surface at a grazing incidence angle causing electrons to be contributed to the beam thereby neutralizing part of the ionized atoms and molecules of the beam. The beam is directed through electrostatic deflection plates which separate out remaining ionized particles producing a neutral beam.

REFERENCES:
patent: 2890342 (1959-06-01), Coulombe
patent: 3424904 (1969-01-01), Donnally
patent: 3660655 (1972-05-01), Wardell
patent: 3700899 (1972-10-01), Kaminsky
patent: 3767925 (1973-10-01), Foley, Jr. et al.
patent: 4019989 (1977-04-01), Hazewindus et al.
Barnett et al., "Energy Dispersed Neutral Beams," Rev. Sci. Instr., 43 (1), (1972).

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