Method and apparatus for producing laminated capacitors

Details Method and apparatus for producing laminated capacitors Method and apparatus for producing laminated capacitors

1981-07-16

1983-03-29

Morgenstern, Norman

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

427 81, 427251, 4272555, 4272556, 4272557, 427404, 4274071, 118664, 118697, 118719, 118720, 118721, 118730, B05C 1100

Patent

active

043783821

ABSTRACT:
Method for producing laminated capacitors, including a rotatable drum having a periphery and recesses formed therein, carriers disposed on the drum in the recesses defining a setting range on the periphery of the drum, a first vacuum chamber for metal layer deposition, a second vacuum chamber for insulating material layer deposition, means for supplying a vapor jet through a path in the first vacuum chamber and a shielding mask for shielding the carriers from the vapor jet, which includes shielding off the carriers from the vapor jet with the shielding mask before vapor deposition, alternatingly conducting the carriers on the drum through the first and second vacuum chambers, removing the shielding mask from the vapor jet path after a given number of revolutions of the drum for the period during which the setting range on the periphery of drum rotates through the first zone, and reintroducing the shielding mask in the vapor jet path after the last metal layer has been deposited during the rotation through the setting range, and a device for carrying out the method.

REFERENCES:
patent: 4121537 (1978-10-01), Maruyama et al.
patent: 4207836 (1980-06-01), Nonaka

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