Method and apparatus for producing ions by surface ionization of

Details Method and apparatus for producing ions by surface ionization of Method and apparatus for producing ions by surface ionization of

1988-01-11

1989-07-04

Howell, Janice A.

Radiant energy

Ion generation

Field ionization type

250424, 250251, 250281, B01D 5944

Patent

active

048453676

ABSTRACT:
A method and apparatus for producing ions by surface ionization by increasing the molecular energy of the substance to be ionized to the hyperthermal energy range, and directing a beam of the substance to impinge against a solid surface disposed in a vacuum chamber. The solid surface is one e.g., clean diamond or dirty molybdenum, which is capable of inducing from the substance, e.g., an organic halide, molecular ionization or dissociative ionization of the substance, and one which does not react with the molecules or tend to neutralize the produced ions. The molecular energy includes kinetic energy gained in aerodynamic acceleration by seeding a light gas, e.g., hydrogen or helium, with molecules of the substance to be ionized, thereby producing a hyperthermal beam of 0.5-20 electron volts of the substance to be ionized.

REFERENCES:
patent: 4442354 (1984-04-01), Hurst et al.
patent: 4755344 (1988-07-01), Friedman et al.
B. Rasser et al., Surface Ionization Source for Heavy Ions, 1/2/80.

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