Method and apparatus for producing extreme ultraviolet...

Details Method and apparatus for producing extreme ultraviolet... Method and apparatus for producing extreme ultraviolet...

2004-09-01

2008-09-23

Wells, Nikita (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S503100, C250S493100, C372S076000, C315S111210

Reexamination Certificate

active

07427766

ABSTRACT:
A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced. The gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).

REFERENCES:
patent: 6320937 (2001-11-01), Mochizuki
patent: WO199929145 (1999-06-01), None
patent: WO200101736 (2001-01-01), None

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