Method and apparatus for producing extreme ultra-violet light fo

Details Method and apparatus for producing extreme ultra-violet light fo Method and apparatus for producing extreme ultra-violet light fo

1997-02-04

2000-10-17

Anderson, Bruce C.

Radiant energy

Radiant energy generation and sources

2504921, G21G 400

Patent

active

061335770

ABSTRACT:
A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and a diffuser for capturing a substantial portion of the gas so as to mitigate contamination caused thereby. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like.

REFERENCES:
patent: 3156950 (1964-11-01), Walton, Jr.
patent: 3686528 (1972-08-01), Sheets
patent: 3709434 (1973-01-01), Gebbardt et al.
patent: 3876149 (1975-04-01), Futerko
patent: 3972474 (1976-08-01), Keur
patent: 4161280 (1979-07-01), Kasinskas
patent: 4178078 (1979-12-01), Hausmann
patent: 4408338 (1983-10-01), Grobman
patent: 4455470 (1984-06-01), Klein et al.
patent: 4549082 (1985-10-01), McMillan
patent: 4560880 (1985-12-01), Perrie et al.
patent: 4577122 (1986-03-01), Kung
patent: 4584479 (1986-04-01), Lamattina et al.
patent: 4607167 (1986-08-01), Petric
patent: 4692934 (1987-09-01), Forsyth
patent: 4730784 (1988-03-01), Boch et al.
patent: 4820927 (1989-04-01), Langner et al.
patent: 4830280 (1989-05-01), Yankoff
patent: 4954715 (1990-09-01), Zold
patent: 4980563 (1990-12-01), George et al.
patent: 4982067 (1991-01-01), Marantz et al.
patent: 4990789 (1991-02-01), Uesaki
patent: 5012105 (1991-04-01), Ando et al.
patent: 5012853 (1991-05-01), Bihlmaier
patent: 5103102 (1992-04-01), Economou et al.
patent: 5175929 (1993-01-01), Anthony et al
patent: 5185552 (1993-02-01), Suzuki et al.
patent: 5204506 (1993-04-01), Asmus et al.
patent: 5214290 (1993-05-01), Sakai
patent: 5298835 (1994-03-01), Muehlberger et al.
patent: 5376791 (1994-12-01), Swanson et al.
patent: 5499282 (1996-03-01), Silfvast
patent: 5577092 (1996-11-01), Kublak et al.
patent: 5643801 (1997-07-01), Ishihara et al.
patent: 5644137 (1997-07-01), Waggener et al.
Electron-Gun-Driven EUV Lithography System, OSA Proceedings on Extreme Ultraviolet Lithography, vol. 23, Alan M. M. Todd, Ira S. Lehrman, Jayaram Krishnaswamy, Vincent Calia, and Robert Gutowski, 1994, 274-277.
Electron-Gun-Driven EUV Lithography System, OSA Proceedings On Extreme Ultraviolet Lithography, vol. 23, Alan M. Todd, Ira S. Lehrman, Jayaram Krishnaswamy, Vincent Calia, and Robert Gutowski, 1994, 274-277.
Cluster Formation In Expanding Supersonic Jets: Effect of Pressure, Temperature, Nozzle Size, and Test Gas, O.F. Hagena and W. Obert, The Journal of Chemical Physics, vol. 56, No. 5, Mar. 1, 1972, 1793-1802.
Cluster Ion sources (Invited), Otto F. Hagena, Rev. Sci. Instrum., vol. 63, No. 4, Apr. 1992, 2374-2379.
Density Measurements of a Pulsed Supersonic Gas Jet Using Nuclear Scattering, J.G. Pronco, D. Kohler, I.V. Chapman, T.T. Bardin, P.C. Filbert, and J.D. Hawley, Rev.Sci.Instrum., vol. 64, No. 7, Jul. 1993, 1744-1747.

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