Method and apparatus for producing carbon coatings by sputtering

Details Method and apparatus for producing carbon coatings by sputtering Method and apparatus for producing carbon coatings by sputtering

1977-09-07

1979-11-06

Mack, John H.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

C23C 1500

Patent

active

041735226

ABSTRACT:
A method for producing carbon coatings by sputtering comprises placing the target material to be sputtered which is made of a fibrous carbon material such as paper, velvet, wood, etc. which has been charred on the cathode. The apparatus comprises an electrode forming an anode which is arranged in spaced relationship to a cathode.

REFERENCES:
patent: 3813282 (1974-05-01), Masotti et al.
patent: 3846294 (1974-11-01), Vossen
Handbook of Chemistry and Physics; Chemical Rubber Company 45th Edition, 1964-1965; p. F1.

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