Method and apparatus for producing an hf-induced noble-gas plasm

Details Method and apparatus for producing an hf-induced noble-gas plasm Method and apparatus for producing an hf-induced noble-gas plasm

1988-04-07

1989-10-31

Groody, James J.

Electric lamp and discharge devices: systems

Pulsating or a.c. supply

Induction-type discharge device load

31511121, 315267, 31323131, 313570, 313607, 313631, 333 24C, 333 99PL, H01J 724

Patent

active

048779997

ABSTRACT:
The invention concerns a method and apparatus to produce a noble-gas plasma for excitation in optical emission spectrometry. The apparatus includes an hf generator feeding an oscillation circuit consisting of at least one inductor and one capacitor. The capcitor includes at least two capacitor plates which are so shaped and mutually arranged that they enclose a cavity in which the plasma may form.

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