Method and apparatus for producing a thermal atomic oxygen beam

Details Method and apparatus for producing a thermal atomic oxygen beam Method and apparatus for producing a thermal atomic oxygen beam

1993-01-25

1994-01-18

Berman, Jack I.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

H05H 300

Patent

active

052801748

ABSTRACT:
Atomic oxygen atoms are routed to a material through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at the surface of the material. However, the material surface continues to be exposed to the atomic oxygen.

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Brink et al., Rev. Sci. Instr., vol. 39, No. 8, Aug. 1968, pp. 1171-1172.

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