Chemistry: electrical and wave energy – Processes and products
Patent
1992-09-09
1994-08-09
Gorgos, Kathryn
Chemistry: electrical and wave energy
Processes and products
204243R, 75612, 75621, 419 61, C25C 328
Patent
active
053363787
ABSTRACT:
A sputtering target for forming a thin film consisting of high-purity titanium, in which the content of alkali metal is 0.1 ppm or less, the content of radio active elements is 1 ppb or less, and the oxygen content is 100 ppm or less, and, further, the balance of the elements is Ti, is produced by a fused salt electrolysis, in which the members of the electrolytic cell being in contact with the fused salt consist of Ni.
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Kikutake Naoyuki
Kuroki Masami
Nishimura Eiji
Shindou Yuuichiro
Gorgos Kathryn
Japan Energy Corporation
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