Method and apparatus for producing a high-purity titanium

Chemistry: electrical and wave energy – Processes and products

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204243R, 75612, 75621, 419 61, C25C 328

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active

053363787

ABSTRACT:
A sputtering target for forming a thin film consisting of high-purity titanium, in which the content of alkali metal is 0.1 ppm or less, the content of radio active elements is 1 ppb or less, and the oxygen content is 100 ppm or less, and, further, the balance of the elements is Ti, is produced by a fused salt electrolysis, in which the members of the electrolytic cell being in contact with the fused salt consist of Ni.

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patent: 4686025 (1987-08-01), Cohen et al.
patent: 5054421 (1991-10-01), Ito et al.

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