Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate
2003-08-15
2009-11-10
Padgett, Marianne L (Department: 1792)
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
C427S534000, C427S569000, C216S071000, C134S019000, C134S021000, C134S037000
Reexamination Certificate
active
07615259
ABSTRACT:
The present invention is a processing method for applying predetermined processing to a workpiece with said workpiece mounted on a mounting stage arranged in a process chamber in a depressurized atmosphere, in which when no workpiece is mounted on the mounting stage, an inactive gas is discharged from at least a heat transfer gas supply hole of the mounting stage in the process chamber so that a gas layer is formed on a mounting surface of the mounting stage. The present invention is also a processing apparatus.
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Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Padgett Marianne L
Tokyo Electron Limited
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