Method and apparatus for processing substrates

Details Method and apparatus for processing substrates Method and apparatus for processing substrates

1998-10-28

2000-06-27

Arbes, Carl J.

Metal working

Method of mechanical manufacture

Electrical device making

29739, 29740, 29741, H05K 330, B23P 1900

Patent

active

060790989

ABSTRACT:
When processing substrates in a plurality of automatic processing units that are arranged following one another, the positional coordinates of the substrates as well as additional geometrical data about circuit markings or function markings, are determined in each automatic processing unit and employed for the processing. The geometrical data is determined only in the first automatic processing unit and is communicated via a bus system to the second automatic processing unit. It is utilized in the second automatic processing unit, which leads to a lower time expenditure.

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patent: 5692292 (1997-12-01), Asai et al.

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