Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1993-03-11
1994-08-02
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
73643, 250306, 250307, 2504922, 25049221, G01B 528, G01N 2300, G01N 2131, C21K 100
Patent
active
053334957
ABSTRACT:
A method for detecting a photoacoustic signal includes the steps of modulating the intensity of light obtained from a light source at a predetermined modulation frequency, exciting a specimen by directing the intensity-modulated light onto the specimen, thereby generating a photoacoustic effect in the specimen, detecting the photoacoustic effect generated in the specimen and producing a detection signal indicative of the detected photoacoustic effect, and extracting information about the surface and interior of the specimen from the detection signal, wherein the intensity-modulated light is emitted from an aperture of a near-field optical scanning microscope used in directing the intensity-modulated light onto the specimen while a distance between the aperture of the near-field optical scanning microscope and the surface of the specimen is maintained constant irrespective of the photoacoustic effect generated in the specimen.
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Kohno Makiko
Nakata Toshihiko
Noguchi Minori
Yamaguchi Hiroshi
Dombroske George M.
Hitachi , Ltd.
Williams Hezron E.
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