Method and apparatus for probe card alignment in a test system

Details Method and apparatus for probe card alignment in a test system Method and apparatus for probe card alignment in a test system

2011-07-12

2011-07-12

Nguyen, Ha Tran T (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750240, C324S756030, C324S762010, C324S754070

Reexamination Certificate

active

07977956

ABSTRACT:
Embodiments of methods and apparatus for aligning a probe card assembly in a test system are provided herein. In some embodiments, an apparatus for testing devices may include a probe card assembly having a plurality of probes, each probe having a tip for contacting a device to be tested, and having an identified set of one or more features that are preselected in accordance with selected criteria for aligning the probe card assembly within a prober after installation therein. In some embodiments, the identity of the identified set of one or more features may be communicated to the prober to facilitate a global alignment of the probe card assembly that minimizes an aggregate misalignment of all of the tips in the probe card assembly.

REFERENCES:
patent: 4985676 (1991-01-01), Karasawa
patent: 5621313 (1997-04-01), Tsuta
patent: 6784678 (2004-08-01), Pietzschmann
patent: 7342402 (2008-03-01), Kim et al.
patent: 7405584 (2008-07-01), Fujita et al.
patent: 7777510 (2010-08-01), Matsuzawa
patent: 2005/0140380 (2005-06-01), Fukasawa et al.
patent: 2008/0150566 (2008-06-01), Kim et al.

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