Electric lamp and discharge devices: systems – Pulsating or a.c. supply – With power factor control device
Reexamination Certificate
2007-12-04
2007-12-04
Vo, Tuyet (Department: 2821)
Electric lamp and discharge devices: systems
Pulsating or a.c. supply
With power factor control device
C315S246000, C315S291000, C315S307000, C315S224000
Reexamination Certificate
active
10947397
ABSTRACT:
A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up, uses a feedforward type of control loop to tightly regulate the power supplied to the dynamic electrical load, such as loads caused by variable and inconsistent plasma impedance. A feedback control loop can also be used in combination with the feedforward loop, but at a slower rate, to help regulate the amount of power provided to the load.
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MKS Instruments Inc.
Proskauer Rose LLP
Vo Tuyet
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