Data processing: generic control systems or specific application – Specific application – apparatus or process – Specific application of temperature responsive control system
Reexamination Certificate
2006-02-07
2006-02-07
Von Buhr, Maria N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Specific application of temperature responsive control system
C700S121000
Reexamination Certificate
active
06996459
ABSTRACT:
To prevent a furnace in a semiconductor process from temperature and gas excursion, a paddle and spike thermal couples arranged on the sidewall of the tube and adjacent to the heater, respectively, are connected to a temperature controller to regulate the heater, and a mass controller adjusts the gas flow injected to the tube. In the method, the spike thermal couple, peddle thermal couple and zero point of the mass flow controller are checked to maintain within a first and second temperature ranges and a first gas flow speed range, respectively, and after wafers are loaded and temperature is ramped up, the peddle thermal couple and mass flow controller are checked again to maintain within a third temperature range and second gas flow speed range.
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Chang Chung Chih
Ho Ta Neng
Lin Chung Pin
Yang Lin Wu
Macronix International Co. Ltd.
Rabin & Berdo P.C.
Von Buhr Maria N.
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