Method and apparatus for pressure control and flow measurement

Details Method and apparatus for pressure control and flow measurement Method and apparatus for pressure control and flow measurement

2007-04-17

2007-04-17

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Reexamination Certificate

active

11475805

ABSTRACT:
A method and apparatus for gas control is provided. The apparatus may be used for controlling gases delivered to a chamber, controlling the chamber pressure, controlling the delivery of backside gas between a substrate and substrate support and the like. In one embodiment, an apparatus for controlling gas control includes at least a first flow sensor having a control valve, a first pressure sensor and at least a second pressure sensor. An inlet of the first flow sensor is adapted for coupling to a gas supply. A control valve is coupled to an outlet of the flow sensor. The first pressure sensor is adapted to sense a metric indicative of the pressure upstream of the first flow sensor. The second pressure sensor is adapted to sense a metric indicative of the pressure downstream of the control valve.

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