Method and apparatus for preparing specimen

Details Method and apparatus for preparing specimen Method and apparatus for preparing specimen

1997-01-30

1999-05-25

Anderson, Bruce

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2505051, H01J 3731

Patent

active

059071575

ABSTRACT:
A method and apparatus for preparing a specimen adapted for electron microscopy comprises an evacuated specimen-processing chamber. A specimen having a surface to be processed is placed inside the processing chamber A beam-blocking member is placed close to the processed surface so as to block a part of an etching beam A first etching step is performed by directing the beam at the specimen via the blocking member. Then, the specimen and the blocking member are moved relative to each other. Finally, a second etching step is performed by directing the beam at the specimen via the blocking member. As a result, the specimen becomes a thin film and it can be observed with the electron microscope.

REFERENCES:
patent: 3736425 (1973-05-01), Chernow
patent: 4181860 (1980-01-01), Sumi
patent: 4263514 (1981-04-01), Reeds
patent: 4550258 (1985-10-01), Omata et al.
patent: 4739173 (1988-04-01), Blosser et al.
patent: 4899060 (1990-02-01), Lischke
patent: 5166531 (1992-11-01), Huntzinger
patent: 5180919 (1993-01-01), Oae et al.
patent: 5364718 (1994-11-01), Oae et al.

Affiliated with

Also associated with

Rating

Method and apparatus for preparing specimen does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for preparing specimen, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for preparing specimen will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-402507