Method and apparatus for precision SEM measurements

Details Method and apparatus for precision SEM measurements Method and apparatus for precision SEM measurements

1987-02-13

1988-08-23

Anderson, Bruce C.

Radiant energy

Calibration or standardization methods

250307, 250310, G01D 1800, G01N 2300

Patent

active

047663111

ABSTRACT:
A method and apparatus for making precise measurements as small as in submicron distances of an object or specimen (13) includes a stage (18) which is movable under the control of a microprocessor (20). An instrument, such as a scanning electron microscope (10) scans the object (13) to obtain a first scan representation thereof. The stage (18) is then shifted a precise known distance and a second scan is made thereof. The results of the two scans are stored and compared by the microprocessor (20) to determine the apparent magnitude of the stage shift in arbitrary units. This apparent magnitude is then equated to the known precise shift distance to calibrate the arbitrary units. The microprocessor (20) can then calculate the desired measurement from the data of either of the two scans stored therein.

REFERENCES:
patent: 3719776 (1973-03-01), Fujiyasu et al.
patent: 4039829 (1977-08-01), Kato et al.
patent: 4052603 (1977-10-01), Karlson
patent: 4221965 (1980-09-01), Konishi et al.
patent: 4385317 (1983-05-01), Furuya et al.

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