Method and apparatus for positioning and biasing an electro-opti

Details Method and apparatus for positioning and biasing an electro-opti Method and apparatus for positioning and biasing an electro-opti

1993-03-05

1995-02-07

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

359249, G01J 120

Patent

active

053877888

ABSTRACT:
An imaging method creates a two-dimensional image of a voltage distribution or a capacitance distribution of a substrate under test using an electro-optic modulator. A coarse modulator calibration determines the effect of non-uniformities in the modulator and determines a look-up table relating the gap distance between the modulator and the substrate to the intensity of the light emerging from the modulator. A positioning means calibration determines a look-up table relating control voltage to response by the positioning means. The modulator is moved over a portion of the substrate and then undergoes a positioning step, a fine onsite calibrating step, and a measuring step. The positioning step can be accomplished using the intensity of emerging light to determine modulator gap distance, and the response verses control voltage look-up table to determine a control signal to vertically position the modulator. The look-up tables permit the modulator to be position substantially parallel to the substrate at a desired gap distance using one step positioning.

REFERENCES:
patent: 4019807 (1977-04-01), Boswell
patent: 4634853 (1987-01-01), Kanamaru
patent: 4983911 (1991-01-01), Henley

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