Method and apparatus for positioning a substrate on a...

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Reexamination Certificate

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C355S053000, C355S077000, C356S400000

Reexamination Certificate

active

10875537

ABSTRACT:
The invention relates to a method for positioning a substrate relative to a substrate table, is presented. When the substrate is positioned on the substrate table for a first time, a first relative position of the substrate with respect to the substrate table is determined. When the substrate is positioned on the substrate table a second subsequent time, a second relative position of the substrate with respect to the substrate table is determined and the position of the substrate table with respect to the substrate is adjusted based on the first and second relative positions, so that the substrate is positioned with respect to the substrate table substantially equally to the first relative position.

REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6188467 (2001-02-01), Yamatsu et al.
patent: 6778258 (2004-08-01), del Puerto et al.
patent: 2001/0014170 (2001-08-01), Willems van Dijk et al.
patent: 2001/0022652 (2001-09-01), van Schaik et al.
patent: 1 124 162 (2001-08-01), None
patent: 1 304 727 (2003-04-01), None
patent: 2003-059809 (2003-02-01), None
patent: 98/33096 (1998-07-01), None
patent: 98/38597 (1998-09-01), None
patent: 98/40791 (1998-09-01), None
European Search Report dated Apr. 23, 2004, for EP 3077016.

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