Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2008-07-29
2008-07-29
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S053000, C355S077000, C356S400000
Reexamination Certificate
active
07405810
ABSTRACT:
The invention relates to a method for positioning a substrate relative to a substrate table, is presented. When the substrate is positioned on the substrate table for a first time, a first relative position of the substrate with respect to the substrate table is determined. When the substrate is positioned on the substrate table a second subsequent time, a second relative position of the substrate with respect to the substrate table is determined and the position of the substrate table with respect to the substrate is adjusted based on the first and second relative positions, so that the substrate is positioned with respect to the substrate table substantially equally to the first relative position.
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European Search Report dated Apr. 23, 2004, for EP 3077016.
Hennus Pieter Renaat Maria
Vink Jacob Willem
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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