Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1988-06-01
1990-07-03
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
250548, 356400, 356401, G01B 1100
Patent
active
049385984
ABSTRACT:
The present invention is of an apparatus, in a reduction-projection exposure apparatus, for reduction-projection position detection comprising illuminating means for illuminating a registration mark on a specimen with three or four wavelengths of laser beams oscillated in an Ar laser and one or two wavelengths, which are different from the aforesaid wavelengths, of laser beams oscillated in a He-Ne laser passed through a reduction-projection lens, an image forming optical system condensing, through the reductio-projection lens, reflected beams from the the registration mark on the specimen illuminated by the illuminating means and separating the beams into beams of four wavelengths, at least, out of the aforesaid wavelengths, for forming images of the separated beams, and image pick-up means for picking up the images, formed by the image forming optical system, of the registration mark on the specimen, thereby to detect the position of the registration mark, and of a relative method thereto.
REFERENCES:
patent: 4355892 (1982-10-01), Mayer et al.
patent: 4779986 (1988-10-01), Nakashima et al.
patent: 4798962 (1989-01-01), Matsumoto et al.
Akiyama Nobuyuki
Yamauchi Yoshihiko
Evans F. L.
Hitachi , Ltd.
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