Optics: measuring and testing – Inspection of flaws or impurities – Bore inspection
Reexamination Certificate
2006-08-22
2006-08-22
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Bore inspection
C356S394000, C356S237200
Reexamination Certificate
active
07095496
ABSTRACT:
A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.
REFERENCES:
patent: 3999866 (1976-12-01), Mathisen
patent: 4046474 (1977-09-01), Lee
patent: 4386850 (1983-06-01), Leahy
patent: 5004340 (1991-04-01), Tullis et al.
patent: 5129724 (1992-07-01), Brophy et al.
patent: 5144363 (1992-09-01), Wittekoek et al.
patent: 5144524 (1992-09-01), Tullis et al.
patent: 5321495 (1994-06-01), Hagiwara et al.
patent: 5355212 (1994-10-01), Wells et al.
patent: 5383018 (1995-01-01), Sadjadi
patent: 5486701 (1996-01-01), Norton et al.
patent: 5502564 (1996-03-01), Ledger
patent: 5889593 (1999-03-01), Bareket
patent: 6078042 (2000-06-01), Fellows
patent: 6384408 (2002-05-01), Yee et al.
patent: 6405101 (2002-06-01), Johanson et al.
patent: 6563586 (2003-05-01), Stanke et al.
patent: 6743646 (2004-06-01), Jakatdar et al.
patent: 6771374 (2004-08-01), Rangarajan et al.
patent: 64-30242 (1989-02-01), None
patent: 2-47823 (1990-02-01), None
patent: 4-158540 (1992-06-01), None
Johnson Kenneth
Norton Adam E.
Sezginer Abdurrahman
Tuitje Holger A.
Nguyen Sang H.
Stallman & Pollock LLP
Toatley , Jr. Gregory J.
Tokyo Electron Limited
LandOfFree
Method and apparatus for position-dependent optical... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for position-dependent optical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for position-dependent optical... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3687827