Abrading – Machine – Rotary tool
Reexamination Certificate
2006-02-28
2006-02-28
Morgan, Eileen P. (Department: 3723)
Abrading
Machine
Rotary tool
28, 28
Reexamination Certificate
active
07004827
ABSTRACT:
A carrier has openings for holding workpieces during polishing. Upper and lower polishing pads push against upper and lower surfaces of the workpieces, respectively. A ring is provided within the openings. This ring surrounds the workpieces, and prevents or reduces roll-off.
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Adachi Koji
Mori Richard Shigetoshi
Suzuki Shoji
Komag, Inc.
Morgan Eileen P.
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