Method and apparatus for polishing a workpiece

Details Method and apparatus for polishing a workpiece Method and apparatus for polishing a workpiece

2006-07-18

2006-07-18

Ackun Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S057000, C451S444000

Reexamination Certificate

active

07077730

ABSTRACT:
A method and apparatus for polishing a workpiece are set forth which can polish the workpiece at a constant rate at a stable condition even when plural workpieces are continually polished. The method comprises dressing a polishing surface of a polishing table while supplying a dressing solution. After the dressing, the dressing solution remaining on the polishing surface is removed by rotating the polishing table at a dewatering rotation speed while stopping the supply of the dressing solution. Then, the workpiece is polished by making the workpiece slidingly contact with the polishing surface while supplying a polishing solution to the polishing surface.

REFERENCES:
patent: 5010692 (1991-04-01), Ishida et al.
patent: 5651725 (1997-07-01), Kikuta et al.
patent: 5857898 (1999-01-01), Hiyama et al.
patent: 6660124 (2003-12-01), Kawasaki et al.

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