Method and apparatus for polishing a hard disk substrate

Details Method and apparatus for polishing a hard disk substrate Method and apparatus for polishing a hard disk substrate

1997-02-21

2000-04-04

Eley, Timothy V.

Abrading

Machine

Rotary tool

451446, 451 60, B24B 500, B24B 2900

Patent

active

060454377

ABSTRACT:
Substrates to be used in manufacturing hard disks are polished in a two-step process entailing a coarse and fine polishing in a single polishing machine. The use of this method and apparatus eliminates the need for two separate polishing machines and for transferring the disks from one polishing machine to another. Furthermore, the overall quality of hard disk substrates polished by this method and apparatus, including smoothness, flatness and edge roll-off, is superior to that achieved by the prior art.

REFERENCES:
patent: 2401953 (1946-06-01), McCain
patent: 2618911 (1952-11-01), Indge
patent: 3541734 (1970-11-01), Clar
patent: 3845587 (1974-11-01), Klievoneit
patent: 4217734 (1980-08-01), Frei
patent: 4272924 (1981-06-01), Masuko et al.
patent: 4502252 (1985-03-01), Iwabuchi
patent: 5533923 (1996-07-01), Shamouilian et al.
patent: 5645472 (1997-07-01), Nagahashi et al.

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