Method and apparatus for point-by-point scanning of a specimen

Details Method and apparatus for point-by-point scanning of a specimen Method and apparatus for point-by-point scanning of a specimen

2005-07-05

2005-07-05

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C359S200700

Reexamination Certificate

active

06914238

ABSTRACT:
A method and an apparatus for point-by-point scanning of a specimen (15) are disclosed. The method is characterized by the steps of generation (45) of a nominal signal (10) for each scan point and transfer (47) of the nominal signal to a scanning device (7). In further steps, determination (49) of an actual signal (25) for each scan point from the setting of the scanning device (7), detection (51) of at least one detection signal (21) for each scan point, calculation (53) of a display signal (27) and an image point position (29) from the actual signal (25) and/or the nominal signal (10) and the detection signal (21), and assignment (55) of the display signal (27) to the image point position (29), are performed.

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