Coating apparatus – Gas or vapor deposition – With treating means
Patent
1995-10-17
1997-08-26
Niebling, John
Coating apparatus
Gas or vapor deposition
With treating means
118728, 118733, C23C 1600
Patent
active
056606397
ABSTRACT:
An improved plasma treatment apparatus and method are provided, wherein the flow of ionizable gas across an article surface to be treated is optimized through the use of one or more flow lines having a plurality of distribution orifices therealong. The flow lines closely conform to at least one contour of the article surface.
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Tisack Michael D.
Wilski Lawrence F.
Chang Joni Y.
Ford Motor Company
Niebling John
Porcari Damian
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