Method and apparatus for plasma treating an article

Coating apparatus – Gas or vapor deposition – With treating means

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118728, 118733, C23C 1600

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active

056606397

ABSTRACT:
An improved plasma treatment apparatus and method are provided, wherein the flow of ionizable gas across an article surface to be treated is optimized through the use of one or more flow lines having a plurality of distribution orifices therealong. The flow lines closely conform to at least one contour of the article surface.

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