Electric heating – Metal heating – By arc
Patent
1996-05-17
2000-03-07
Paschall, Mark
Electric heating
Metal heating
By arc
21912141, 20429837, 20429838, 156345, 118723MW, B23K 1000
Patent
active
06034346&
ABSTRACT:
An electromagnetically coupled plasma processing apparatus is arranged so that a microwave sent through a coaxial waveguide is enlarged by a parallel disk waveguide before being radiated from an enlarged coaxial portion. The electromagnetically coupled plasma processing apparatus has a loop antenna for passing a high-frequency wave, a cavity resonator for surrounding the loop antenna, and a slit in double-layer structure in a position where the cavity resonator faces a plasma. The plasma on the surface of a wafer can be processed uniformly with various desirable effects including: (1) preventing foreign matter from being produced and abnormal discharge because of electrostatic coupling; (2) improving the ignitability and stability of a plasma; (3) lowering the antenna voltage; and (4) effecting uniform processing by providing an opposed grounding electrode.
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Edamura Manabu
Kaji Tetsunori
Kanai Saburou
Nishio Ryoji
Yoshioka Ken
Hitachi , Ltd.
Paschall Mark
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