Method and apparatus for phase measurement of signals at a measu

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324158T, G01R 2500, G01R 3126

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049671502

ABSTRACT:
In the method and apparatus for the phase measurement of arbitrary signals at a measuring point, for example, of surface waves on piezoelectrical substrates, the surface waves are excited on the surface of a specimen having piezoelectrical features. The measuring point on the specimen surface is scanned by a particle beam and a secondary electrical signal at the measuring point is supplied to an evaluation circuit via a detector. A phase detector within the evaluation circuit is operated in a linear region of its output characteristic curve with the use of a feedback. This makes it possible to keep the phase at the phase detector constant. The phase of the signal to be examined, for example, of the surface wave, which is produced at a interdigital transducer is influenced due to the feedback.

REFERENCES:
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patent: 4621233 (1986-11-01), Davari et al.
patent: 4678988 (1987-07-01), Brust
patent: 4812748 (1989-03-01), Brust et al.
"Visualization of Traveling Surface Acoustic Waves Using a Scanning Electron Microscope", by Feuerbaum et al., dated 1980, pp. 503-508.
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"Excitation of Surface Acoustic Waves Using Electron Acoustic Microscope", by Yamanouchi et al., Japanese Journal of Applied Physics, vol. 23, Suppl. 23-1, Dec. 6, 1984, pp. 191-193.
"Scanned Electron-Beam Probe Shows Surface Acoustic Waves in Action", by Feuerbaum et al., May 19, 1983, Electronics Magazine, pp. 132-136.
"Phase Sensitive Laser Probe for High-Frequency Surface Acoustic Wave Measurement" by Engan IEEE Transactions on Sonics & Ultrasonics, vol. Su. 25, No. 6, Nov., 1978, pp. 372-377.
"A Phase Sensitive Laser Probe for Pulsed Saw Measurements" by Engan, IEEE Transactions on Sonics & Ultrasonics, vol. Su. 29, No. 5, Sep., 1982, pp. 281-283.

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