Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2004-09-08
2010-06-08
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S479000
Reexamination Certificate
active
07733497
ABSTRACT:
An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency of the first and/or second radiations varies over time. An interference is detected between at least one third radiation associated with the first radiation and at least one fourth radiation associated with the second radiation. Alternatively, the first electro-magnetic radiation and/or second electro-magnetic radiation have a spectrum which changes over time. The spectrum may contain multiple frequencies at a particular time. In addition, it is possible to detect the interference signal between the third radiation and the fourth radiation in a first polarization state. Further, it may be preferable to detect a further interference signal between the third and fourth radiations in a second polarization state which is different from the first polarization state. The first and/or second electro-magnetic radiations may have a spectrum whose mean frequency changes substantially continuously over time at a tuning speed that is greater than 100 Tera Hertz per millisecond.
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Bouma Brett Eugene
De Boer Johannes Fitzgerald
Tearney Guillermo J.
Yun Seok-Hyun
Dorsey & Whitney LLP
Lyons Michael A
The General Hospital Corporation
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