Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1982-03-29
1985-07-30
Smith, Alfred E.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250504R, 315248, 430311, H01J 6504
Patent
active
045324271
ABSTRACT:
A method and apparatus for performing deep UV photolithography which utilizes a microwave generated electrodeless light source for producing deep UV radiation. This results in faster semiconductor exposure times and less system downtime for changing failed bulbs as well as other advantages which are detailed herein.
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Fusion Systems information packet.
Greenblatt Marshal
Matthews John C.
Ury Michael G.
Wood Charles H.
Berman Jack I.
Fusion Systems Corp.
Smith Alfred E.
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