Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate
2006-04-04
2006-04-04
Osele, Mark A. (Department: 1734)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
C156S583200
Reexamination Certificate
active
07022207
ABSTRACT:
A method and apparatus are provided for peeling a thin film, typically 100 microns or less in thickness, from a liner by use of a rotatable peel rod supported in an air bearing. The air bearing comprises a support plate having arcuate surfaces which are substantially coaxial with a cylindrical film-bearing segment of the peel rod. Air openings in the arcuate surfaces conduct a flow of air into an air bearing gap between the arcuate surfaces and the peel rod.
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3M Innovative Properties Company
Dahl Philip Y.
Osele Mark A.
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