Method and apparatus for PCVD internal coating a metallic pipe b

Details Method and apparatus for PCVD internal coating a metallic pipe b Method and apparatus for PCVD internal coating a metallic pipe b

1989-06-13

1990-01-30

Bueker, Richard

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 47, 118723, C23C 1650

Patent

active

048972851

ABSTRACT:
A microwave plasma method/of depositing a coating of a prescribed material on the internal surface of a pipe by means of a reaction of a vapor phase providing a prescribed material in which:

REFERENCES:
Leaflet, "New ECR Plasma Source", Jun. 25, 1987.
Dance, "Elektronen-Zyklotron-Resonanz", Elektronik-Fertigung, Oct. 22/30, 87, pp. 136-138.

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