Method and apparatus for patterning a workpiece and methods...

Details Method and apparatus for patterning a workpiece and methods... Method and apparatus for patterning a workpiece and methods...

2006-09-19

2006-09-19

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S292000

Reexamination Certificate

active

07110159

ABSTRACT:
An apparatus for patterning a work piece including a source, and at least one reflective tilting surface adapted to induce a phase difference using at least one of a phase shifting plate and a difference in step height. A method corresponding to the apparatus for patterning a work piece. A method of manufacturing the apparatus for patterning a work piece and a Spatial Light Modulator, which may be included therein.

REFERENCES:
patent: 5508841 (1996-04-01), Lin et al.
patent: 6624880 (2003-09-01), Sandström et al.

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